X-ray diffraction gratings

X-ray diffraction gratings


Rectangular grooves with period from 0.5 μm
Groove height up to 200 nm
Grating size up to 20×20 mm2

Substrate: Si, SiO2

Coatings:

  • thin films W, Al, Au etc. 
  • multilayer mirrors W/Si, Mo/Be, Cr/Sc etc.
  • substrate etching


Multilayer diffraction grating




period D=2 μm
50 W/Si bilayers (d=50 Å)



Multilayer diffraction grating with random position of grating grooves



period D=2 μm
50 W/Si bilayers (d=50 Å)


2D grating with round reflecting multilayer elements



 

 

 a: d=6 mm, δΘ=0.036°

 b: d=18.9 mm,  δΘ =0.012°

 

 

c: d=13.4 mm,  δΘ =0.016°

d: d=8.5 mm,  δΘ =0.025°


X-ray diffraction gratings for Bragg reflection





X-ray diffraction by diffraction grating with thin film coating


X-ray diffraction by diffraction grating with etched grooves

X-ray focusing


Grazing incidence phase Fresnel zone plates 1D or 2D x-ray focusing
Groove height up to 100 nm

Zone plate size:
  • 1D focusing up to 50×50 mm2
  • 2D focusing up to 20×0.2 mm2

Substrate: Si, SiO2

Coatings: 
  • thin films W, Al, Au etc
  • substrate etching 

 

 

 Central and outermost zones of grazing incidence zone plate

X-ray focusing by grazing
incidence zone plate on laboratory
x-ray source  



Bragg-Fresnel lenses
Groove height up to 200 nm
Last zone size 0.1 μm

Substrate: 
  • single crystal Si
  • multilayer mirrors W/Si, Mo/Be, Cr/Sc etc.
  • thin films W, Al, Au etc.
  • substrate etching

 

 

 Full view and central zones of Bragg-Fresnel lens

X-ray focusing by Bragg-Fresnel lens



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