X-ray diffraction gratings
Rectangular grooves with period from 0.5 μm
Groove height up to 200 nm
Grating size up to 20×20 mm
2
Substrate: Si, SiO
2
Coatings:
- thin films W, Al, Au etc.
- multilayer mirrors W/Si, Mo/Be, Cr/Sc etc.
- substrate etching
Multilayer diffraction grating
period D=2 μm
50 W/Si bilayers (d=50 Å)
Multilayer diffraction grating with random position of grating grooves
period D=2 μm
50 W/Si bilayers (d=50 Å)
2D grating with round reflecting multilayer elements
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a: d=6 mm, δΘ=0.036°
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b: d=18.9 mm, δΘ =0.012°
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c: d=13.4 mm, δΘ =0.016°
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d: d=8.5 mm, δΘ =0.025°
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X-ray diffraction gratings for Bragg reflection
X-ray diffraction by diffraction grating with thin film coating
X-ray diffraction by diffraction grating with etched grooves
X-ray focusing
Grazing incidence phase Fresnel zone plates 1D or 2D x-ray focusing
Groove height up to 100 nm
Zone plate size:
- 1D focusing up to 50×50 mm2
- 2D focusing up to 20×0.2 mm2
Substrate: Si, SiO
2
Coatings:
- thin films W, Al, Au etc
- substrate etching
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Central and outermost zones of grazing incidence zone plate
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X-ray focusing by grazing
incidence zone plate on laboratory
x-ray source
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Bragg-Fresnel lenses
Groove height up to 200 nm
Last zone size 0.1 μm
Substrate:
- single crystal Si
- multilayer mirrors W/Si, Mo/Be, Cr/Sc etc.
- thin films W, Al, Au etc.
- substrate etching
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Full view and central zones of Bragg-Fresnel lens
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X-ray focusing by Bragg-Fresnel lens
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