Active vibration isolation solutions for AFM, STM, Desktop SEM, Digital Microscopes, etc...

A lightweight and compact AVOS AR active vibration isolation system that counteracts unwanted vibrations for various high-resolution microscopes. The streamlined design allows it to seamlessly become part of the workstation environment, and its straightforward composition requires no follow up tuning.

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Without vibration isolation	With vibration isolation

Key Advantages

• Patented architecture
  

• Active vibration isolation in all six degrees of freedom

• Shortest in height, lightest in weight
  

• Improved microscope performance and image quality
  

• Easy integration into workstation environment

• No follow-up tuning required
  

• Fully decoupled architecture isolates vibrations coming from the floor and vibration generating by the tool

Active vibration isolation solutions for semiconductor industry

A lightweight and compact AVOS AR active vibration isolation system that counteracts unwanted vibrations for sensitive equipment. The streamlined design allows it to seamlessly become part of the workstation environment, and its straightforward composition requires no follow-up tuning.

Ostec technology benefits for semiconductor industry

• Patented architecture

• Active vibration isolation in all 6 degrees of freedom

• Increased machine throughput

• Improved tool's performance and image quality

• Minimized production failures

• Easy integration into tools and workstation environment

• Shortest in height, lightest in weight

• Fully decoupled architecture isolates vibrations coming from the floor and vibration generating by machine, like moving stages, fans, internal motors

• Ability to support massive machines

• No follow-up tuning required