Nano-relief mode

1 nm (30 pm optionally, with atomically flat mirror)

0.3 µm

XY resolution

1 µm

up to 10 µm *

up to 2.5 mm *

0.4 x 0.3 mm *

Pixel size in measurement area

0.3 µm *

Measurement rate

0.1 µm/s *

4 µm/s *

Photodetector**

CCD-matrix 1392х1040

LED (λ_eff = 630 nm)

20x (or 10x, 5x), 2 items without changing magnification

Piezoelectric ceramic element

1D (Z) range 50 mm, 2D (XY) range 75x50 mm

CCD-camera frame grabber, stages controller, device control unit

Included