Optical system

 Optical scheme

Cherny–Turner (astigmatism–compensated in models MSO2001i and MSO2004i)

1 input, 2 outputs

185 nm – 60 μm

3.6

200 mm

0 – 1300 nm (grating 1200 l/mm)

spherical

3 х 10^-5 (20 nm from laser line 632.8 nm)

26 х 10 mm

Imaging

 Horizontal magnification

1.18

1.48 (for the astigmatism-compensated models: MSO2001i, MSO2004i)

< 40 μm

Drive

 Motor type

micro stepper

worm

1.6 arc seconds

± 1 step

10 000 steps/s

Ports

Number of ports

± 0.03 nm

5 s

Optics (for grating 1200 l/mm, slit width 15µm, wavelength 546 nm)

4.12 nm/mm

• PMT (slit width 10 µm)
  

0.11 nm

• Digital cameras (12 µm pixel)
  

0.12 nm

± 0.036 nm

± 0.07 nm

0.012 nm

Gratings

40 х 40 х 6 mm

About the center of grating working surface

1. Automated 4-grating turret (models MSO2004, MSO2004i)

2. Positioner for 1 manually changeable grating (models MSO2001, MSO2001i)

• wavelength (grating 1200 l/mm)

± 0.03 nm

• vertical image

± 40 μm

• wavelength (grating 1200 l/mm)

± 0.05 nm

• vertical image

± 40 μm

Control

On-board CPU

PC

 External interface

Dimensions and weight

300 х 200 х 160 mm

9 kg (standard configuration)